DIELECTRIC LAYER, SEMICONDUCTOR MEMORY DEVICE INCLUDING THE DIELECTRIC LAYER, AND METHODS OF MANUFAC…
Seong Keun Kim, Woo Chul Lee, Sang Tae Kim, Hyun-Cheol Song, Seung Hyub Baek, Ji-Won Choi, Jin Sang Kim, Chong Yun Kang, Christopher W Bielawski, Jung Hwan Yum, Eric S Larsen
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CHN
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201811623773
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2018.12.28